Oblique Powder Blasting for Three-dimensional Micromachining of Brittle Materials

摘要

We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of incidence of the incoming particles to a substrate, covered by a mask, one can exploit the oblique slopes of micropatterned holes and mask underetching phenomena to generate new options for three-dimensional microstructuring. We have identified and quantified the role of secondary rebounding particles in mask underetching.